LED Wafer Process Equipment/Machine
◆Sapphire Thickness Sorting Machine
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| Devices/Units |
Specification |
| Load |
2”/4” Wafer cassette * 8 set |
| Unload |
2”/4” Wafer cassette * 10 set |
| Turn table of load/unload cassette |
Server moter control the location of cassette |
| Transport robot |
3 Axial (X,Y,Z) control |
| Wafer load/unload direction |
Load : Bottom to Top |
| Unload: Top to Bottom |
| Thickness measurement |
Used Laser detector, precision ±2um (untouched measurment). |
| Single point/Cross/米 measueing route for culculating TV5/TTV. |
| Security protection |
1.UPS installed for encure machine operation in power off. |
| 2.Air tank installed for ensure machine operation in air off. |
| Cycle time |
Single point : 12 Sec./wafer. Cross : 20 Sec/wafer. |
| Post measurment distribution |
The unload cassette can be re-set per measuring results. |
| Data collection |
The cassette numbering can be set up by reading bar code label of work sheet and summary the measuring data in file. |
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